May, Gary S. <br/><br/>
Fundamentals of semiconductor manufacturing and process control. 

 - xix, 463p.;  25cm 
<br/><br/><label>ISBN: </label>0-471-78406-O 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Process control-Statistical methods.<br/>Semiconductors-Design and construction.<br/>Integrated Circuits-Design and construction.
<br/><br/><label>Dewey Class. No.: </label>621.38152 M466 2006