TY  - BOOK
AU  - May, Gary S.
AU  - 
AU  - Spanos, Costas J.
TI  - Fundamentals of semiconductor manufacturing and process control
SN  - 0-471-78406-O
U1  - 621.38152 M466 2006 
CY  - New Jersey
PB  - John Wiley & Sons, Inc.
KW  - Process control-Statistical methods
KW  - Semiconductors-Design and construction
KW  - Integrated Circuits-Design and construction
ER  -