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Fundamentals of semiconductor manufacturing and process control.

May, Gary S.

Fundamentals of semiconductor manufacturing and process control. - xix, 463p.; 25cm

ISBN: 0-471-78406-O

Subjects--Topical Terms:
Process control-Statistical methods.
Semiconductors-Design and construction.
Integrated Circuits-Design and construction.

Dewey Class. No.: 621.38152 M466 2006

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